Mircromirror device having a vertical hinge
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United States of America Patent
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Jun 12, 2012
Grant Date -
Nov 11, 2010
app pub date -
Jul 14, 2010
filing date -
Nov 1, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.
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