Mircromirror device having a vertical hinge

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United States of America Patent

PATENT NO 8199394
APP PUB NO 20100284057A1
SERIAL NO

12804112

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Abstract

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A mirror device comprises: a plurality of electrodes disposed on a substrate; a hinge connected to at least one of the electrodes; a mirror connected to the hinge and corresponding to at least one of the electrodes, wherein a barrier layer is comprised between the hinge and mirror, and/or between the hinge and electrode. Also noted is a mirror device production method for producing such-configured mirror device. Further noted is a projection apparatus comprising such-configured mirror device.

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Patent Owner(s)

Patent OwnerAddress
IGNITE INC4405 BAYARD ST PITTSBURGH PA 15213

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Hirotoshi Hachioji, JP 58 417
Ishii, Fusao Menlo Park, US 179 1203
Maeda, Yoshihiro Hachioji, JP 160 1889

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