Template derivative for forming ultra-low dielectric layer and method of forming ultra-low dielectric layer using the same
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United States of America Patent
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Jun 19, 2012
Grant Date -
Sep 4, 2008
app pub date -
Dec 27, 2007
filing date -
Dec 27, 2006
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Abstract
A reactive cyclodextrin derivative or a reactive glucose derivative is used as a template derivative for forming an ultra-low dielectric layer. A layer is formed of the reactive cyclodextrin derivative or the reactive glucose derivative capped with Si—H and then cured in an atmosphere of hydrogen peroxide to form the ultra-low dielectric layer.
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