Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display
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United States of America Patent
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Jun 19, 2012
Grant Date -
Aug 13, 2009
app pub date -
Feb 11, 2009
filing date -
Feb 11, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Methods and devices to measure threshold voltages of electro-mechanical systems devices are disclosed. The threshold voltages are determined based on which of multiple test voltages cause the devices to change states. State changes of the device are detected by monitoring integrated current or charge used to drive the test voltages.
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