Substrate processing system
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United States of America Patent
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Jun 26, 2012
Grant Date -
Jan 1, 2009
app pub date -
Jun 11, 2008
filing date -
Jun 29, 2007
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A cassette waiting block is connected to a transfer in/out block of a coating and developing treatment system, and in the cassette waiting block, a cassette transfer in/out unit, a cassette waiting unit, a cassette delivery unit, and a substrate processing unit are provided. In the cassette waiting block, a cassette transfer unit for transferring the cassette between the cassette transfer in/out unit, the cassette waiting unit, and the cassette deliver unit, and a transfer unit for transferring the substrate between the cassette in the cassette waiting unit and the substrate processing unit are provided. Each cassette waiting unit has an opening mechanism for opening a port of the cassette.
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