Method and apparatus for achieving low resistance contact to a metal based thin film solar cell
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United States of America Patent
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Jun 26, 2012
Grant Date -
Oct 29, 2009
app pub date -
Jun 27, 2008
filing date -
Apr 28, 2008
priority date (Note) -
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Abstract
A system and method of forming a thin film solar cell with a metallic foil substrate are provided. After forming a semiconductor absorber film over the front surface of the metallic foil substrate a back surface of the metallic foil substrate is treated using a material removal process to form a treated back surface in a process chamber. In one embodiment, the material removal process is performed while depositing a transparent conductive layer over the semiconductor absorber film in the process chamber.
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