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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ASML NETHERLANDS B V	5500 AH VELDHOVEN

International Classification(s)

• G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
De, Smit Joannes Theodoor	Eindhoven, NL	50	5946
Derksen, Antonius Theodorus Anna Maria	Eindhoven, NL	56	3384
Donders, Sjoerd Nicolaas Lambertus	′s-Hertogenbosch, NL	253	8312
Hoogendam, Christiaan Alexander	Veldhoven, NL	205	9950
Kolesnychenko, Aleksey	Helmond, NL	35	3183
Lof, Joeri	Eindhoven, NL	94	8170
Loopstra, Erik Roelof	Heeze, NL	325	13468
Modderman, Theodorus Marinus	Neunen, NL	39	4357
Mulkens, Johannes Catharinus Hubertus	Maastricht, NL	213	10886
Ritsema, Roelof Aeilko Siebrand	Eindhoven, NL	37	4991
Simon, Klaus	Eindhoven, NL	89	7360
Straaijer, Alexander	Eindhoven, NL	87	8017
Streefkerk, Bob	Tilburg, NL	201	10575
Van, Santen Helmar	Amsterdam, NL	101	4784

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 26, 2012	US,8208120,B2   US8208120B2	GRANTED PATENT AS SECOND PUBLICATION
September 11, 2008	US,20080218726,A1   US20080218726A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 8208120

Lithographic apparatus and device manufacturing method

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