MEMS device with independent rotation in two axes of rotation
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United States of America Patent
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Jun 26, 2012
Grant Date -
Oct 29, 2009
app pub date -
Apr 29, 2009
filing date -
Apr 29, 2008
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.
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