Mechanical quantity sensor and method of manufacturing the same
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United States of America Patent
Stats
-
Jul 10, 2012
Grant Date -
Apr 8, 2010
app pub date -
Dec 26, 2007
filing date -
Dec 27, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A mechanical quantity sensor includes: a first structure having a fixed portion with an opening, a displaceable portion disposed in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion to each other; a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, the second structure being stacked on the first structure; a first base having a first driving electrode which is disposed on a surface facing the displaceable portion and is made of a conductive material containing Al and Nd, the first base being stacked on the first structure while being connected to the fixed portion; and a second base having a second driving electrode which is disposed on a surface facing the weight portion and is made of the conductive material, the second base being stacked on the second structure while being connected to the pedestal.
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