Methods and systems for thermal-based laser processing a multi-material device

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United States of America Patent

PATENT NO 8217304
SERIAL NO

10107890

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Abstract

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A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

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Patent Owner(s)

  • ELECTRO SCIENTIFIC INDUSTRIES, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cordingley, James J Littleton, US 40 1652
Ehrmann, Jonathan S Sudbury, US 73 2318
Filgas, David M Newbury Park, US 39 859
Johnson, Shepard D Andover, US 33 1079
Lee, Joohan Andover, US 22 807
Smart, Donald V Boston, US 52 2565
Svetkoff, Donald J Ann Arbor, US 57 2961

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