Inductively-coupled plasma device
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United States of America Patent
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Jul 17, 2012
Grant Date -
Apr 28, 2011
app pub date -
Oct 27, 2009
filing date -
Oct 27, 2009
priority date (Note) -
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Abstract
A plasma device configured to receive ionizable media is disclosed. The plasma device includes a first pair of dielectric substrates each having an inner surface and an outer surface. The first pair of dielectric substrates is disposed in spaced, parallel relation relative to one another with the inner surfaces thereof facing one another. The device also includes a first pair of spiral coils each disposed on the inner surface of the dielectric substrates. The first pair of spiral coils is configured to couple to a power source and configured to inductively couple to an ionizable media passed therebetween to ignite the ionizable media to form a plasma effluent.
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