MEMS microphone, production method and method for installing
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United States of America Patent
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Jul 24, 2012
Grant Date -
Nov 13, 2008
app pub date -
Nov 6, 2006
filing date -
Nov 10, 2005
priority date (Note) -
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Abstract
A microphone in a miniaturized form is described herein. The microphone includes a flat carrier substrate having a first recess extending through the carrier substrate. The microphone includes a first electro-acoustic transducer on a first surface of the carrier substrate and at least partially overlapping the first recess. The microphone also includes a cap on a second surface opposite the first surface having a tight seal with the second surface and spanning the first recess. The cap includes at least one metallic layer for electromagnetic shielding.
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