Method of fabricating an acoustic resonator comprising a filled recessed region
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United States of America Patent
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Jul 31, 2012
Grant Date -
Mar 13, 2008
app pub date -
Nov 9, 2007
filing date -
Apr 6, 2005
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Abstract
A method for fabricating an acoustic resonator comprises providing a substrate; fabricating a first electrode adjacent the substrate; fabricating a piezoelectric layer adjacent the first electrode; depositing electrode material to form a second electrode up to a first thickness adjacent the piezoelectric layer; depositing a first photo mask over the second electrode; depositing additional electrode material to form the second electrode up to a second thickness; removing the photo mask thereby forming a recessed region in the second electrode; and filling the recessed region with a fill material.
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