Method for manufacturing a magnetic write head
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United States of America Patent
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Jul 31, 2012
Grant Date -
May 27, 2010
app pub date -
Dec 23, 2009
filing date -
Mar 8, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A method for self aligning a lapping guide with a structure of a write pole. A write pole is formed over a substrate and an electrically conductive material lapping guide material is deposited in a location that is removed from the write pole. A mask is then formed over a portion of the write pole and a portion of the electrically conductive material. A material removal process such as reactive ion etching can then be performed to remove a portion of the magnetic material that is not protected by the mask structure. An magnetic material is then electroplated over the write pole with the write pole, with the mask still in place. In this way, the electroplated material has an edge that is self aligned with an edge of the electrically conductive lapping guide material, both being defined by the same mask structure.
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