Surface-treated ceramic member, method for producing the same and vacuum processing apparatus
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United States of America Patent
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Jul 31, 2012
Grant Date -
Jun 23, 2011
app pub date -
Feb 14, 2011
filing date -
Aug 20, 2008
priority date (Note) -
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Abstract
Disclosed is a surface-treated ceramic member which has a coating film-formed surface comprising a ceramic sintered body with a porosity of 1% or less and a sol-gel coating film of a silicon alkoxide compound polymer formed on at least a part of a ceramic sintered body, wherein the coating film and the surface of the body are coexistent in the coating film-formed surface. Specifically the area of the sol-gel coating film accounts for 5 to 80% of the total area of the coating film-formed surface. The surface-treated ceramic member has excellent corrosion resistance and is free from scattering of particles.
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