Damascene metal-insulator-metal (MIM) device with improved scaleability

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United States of America Patent

PATENT NO 8232175
APP PUB NO 20080123401A1
SERIAL NO

11521204

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Abstract

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A present method of fabricating a memory device includes the steps of providing a dielectric layer, providing an opening in the dielectric layer, providing a first conductive body in the opening, providing a switching body in the opening, the first conductive body and switching body filling the opening, and providing a second conductive body over the switching body. In an alternate embodiment, a second dielectric layer is provided over the first-mentioned dielectric layer, and the switching body is provided in an opening in the second dielectric layer.

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Patent Owner(s)

  • MONTEREY RESEARCH, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Avanzino, Steven Cupertino, US 44 1042
Choo, Bryan Mountain View, US 10 58
Haddad, Sameer San Jose, US 64 558
Marrian, Christie San Jose, US 13 31
Pangrle, Suzette K Cupertino, US 71 1268
Rathor, Manuj Milpitas, US 23 292
Shields, Jeffrey A Sunnyvale, US 75 716
Song, Kevin Santa Clara, US 14 247
VanBuskirk, Michael Saratoga, US 15 108
Wang, Fei San Jose, US 1011 9254
Xie, James San Jose, US 5 4

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