Position detection system for the contactless interferometric detection of a location of a target object and scanning system equipped with the same
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United States of America Patent
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Jul 31, 2012
Grant Date -
Feb 18, 2010
app pub date -
Dec 5, 2007
filing date -
Jan 2, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a position detection system for the contactless interferometric detection of the location of a target object. A target object unit comprises a reference light transmitter, which is configured such that it transmits a reference light beam having curved light wave fronts. The target object unit comprises at least one detector array having a plurality of detector pixels, which is fixed to the target object unit such that the reference light beam of the reference light transmitter impinges on the same.
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