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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
LAM RESEARCH CORPORATION	4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

• B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
de, Larios John M	Palo Alto, US	72	1005
Korolik, Mikhail	San Jose, US	88	4555
Ravkin, Michael	Sunnyvale, US	72	1438
Smith, Michael G R	Dublin, US	13	123
Woods, Carl	Aptos, US	36	417

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 07, 2012	US,8236382,B2   US8236382B2	GRANTED PATENT AS SECOND PUBLICATION
July 21, 2005	US,20050158473,A1   US20050158473A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 8236382

Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same

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