Diaphragm isolation forming through subtractive etching

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8240217
APP PUB NO 20090098318A1
SERIAL NO

11872596

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Abstract

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Described herein is a housing comprising an inside and at least one sidewall, wherein the at least one sidewall comprises inner and outer surfaces. An etch stop deposit is disposed over at least a portion of the housing, and a diaphragm material deposit is disposed over at least a portion of the etch stop deposit.

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Patent Owner(s)

Patent OwnerAddress
KAVLICO CORPORATION14501 PRINCETON AVENUE MOORPARK CA 93021

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gandaria, Enrique Valencia, US 4 1
Guziak, Robert Thousand Oaks, US 4 193

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