Method and system for measuring a surface of an object
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United States of America Patent
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Aug 14, 2012
Grant Date -
Mar 26, 2009
app pub date -
Sep 25, 2008
filing date -
Sep 25, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Methods and systems for measuring a surface of an object are provided, wherein portions of the surface of the object are interferometrically measured and data representing a shape of the surface of the object are obtained by stitching the measurement data corresponding to each portion together. For measuring the individual portions of the surface of the object a variable light shaping member is utilized preferably constructed by arranging two diffraction gratings in a beam path of measuring light and appropriately displacing the two diffraction gratings relative to each other depending on a target shape of a particular portion of the surface of the object.
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