Method for manufacturing an optical element to polarize and split incident light
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United States of America Patent
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Aug 21, 2012
Grant Date -
Jul 22, 2010
app pub date -
Dec 9, 2009
filing date -
Jan 20, 2009
priority date (Note) -
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Abstract
A method for manufacturing an optical element that has a function to polarize and split incident light includes: a) forming a grid portion on a face of a substrate in a plural number with a predetermined pitch; b) forming a diffractive structure resist pattern on the face of the substrate; c) forming the diffractive structure by etching the substrate anisotropically in a thickness direction with the diffractive structure resist pattern; and d) forming a fine line on the grid portion by depositing a reflective material from an oblique direction onto the face of the substrate where the diffractive structure is provided.
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