High quality transparent conducting oxide thin films
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United States of America Patent
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Aug 28, 2012
Grant Date -
Jul 8, 2010
app pub date -
Mar 17, 2008
filing date -
Mar 17, 2008
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Abstract
A transparent conducting oxide (TCO) film comprising: a TCO layer, and dopants selected from the elements consisting of Vanadium, Molybdenum, Tantalum, Niobium, Antimony, Titanium, Zirconium, and Hafnium, wherein the elements are n-type dopants; and wherein the transparent conducting oxide is characterized by an improved electron mobility of about 42 cm2/V-sec while simultaneously maintaining a high carrier density of ˜4.4e×1020 cm−3.
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