Chucking member and spin head and method for chucking substrate using the chucking member
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United States of America Patent
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Sep 4, 2012
Grant Date -
Mar 13, 2008
app pub date -
Aug 31, 2007
filing date -
Sep 12, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A chucking member configured to chuck the edge of a substrate includes a chucking pin which is eccentric from the rotation center. The chucking pin has a streamline shape and includes a first front-end portion disposed at the front end relative to the flow of an air current generated by the rotation of the substrate and a first back-end portion disposed at the back end relative to the flow of the air current. The first front-end portion includes a first tip, and the first front-end portion has a round shape.
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