Method of producing a diffractive optical element and diffractive optical element produced by such a method
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United States of America Patent
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Sep 4, 2012
Grant Date -
Aug 14, 2008
app pub date -
Feb 13, 2008
filing date -
Feb 14, 2007
priority date (Note) -
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Abstract
A microlithography projection exposure system has an illumination system with an illumination optical system. The latter can have at least one diffractive optical element, which is divided into multiple adjacently arranged individual elements, each of which has one specified bundle-forming and polarizing effect.
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