White light scanning interferometer with simultaneous phase-shifting module
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 18, 2012
Grant Date -
N/A
app pub date -
May 11, 2010
filing date -
May 11, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A simultaneous phase-shifting white light scanning interferometer comprises a white light scanning interferometer, a simultaneous phase-shifting module, and a scanner. Light from a short coherence length light source may be polarized and then split, by a polarization type beam-splitter, into orthogonally polarized reference and test beams. The simultaneous phase-shifting module comprises a plurality of detectors, allows for controlled phase shifts between the reference and test beams, and creates at least three independent interferograms, each with different phase shifts between the reference and test beams. The scanner translates the simultaneous phase-shifting module with respect to an object under measurement.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully