Process control using process data and yield data
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United States of America Patent
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Sep 18, 2012
Grant Date -
Feb 9, 2012
app pub date -
Jul 22, 2011
filing date -
Mar 7, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for monitoring a manufacturing tool features acquiring metrology data (“Step a”). Data is acquired for process variables for a first process step performed by the manufacturing tool (“Step b”). A mathematical model of the first process step based on the metrology data and the acquired data is created (“Step c”). Steps b and c are repeated for at least a second process step (“Step d”). An nth mathematical model is created based on the metrology data and the data for the process variables for each of the n process steps (“Step e”). A top level mathematical model is created based on the metrology data and the models created by steps c, d and e (“Step f”). A multivariate metric is calculated based on the top level model of step f and data from subsequent runs of the manufacturing tool. Service is performed if the metric satisfies a condition.
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