Bubbler for the transportation of substances by a carrier gas
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United States of America Patent
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Sep 25, 2012
Grant Date -
Oct 16, 2008
app pub date -
Oct 12, 2006
filing date -
Nov 17, 2005
priority date (Note) -
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Abstract
A bubbler (2) for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member (14) positioned between its inlet (6) and outlet (8) that is provided with a plurality of apertures therein. The member (14) is preferably in the form of a perforated disc having a predefined density of apertures therein to provide optimum pick up and flow of carrier gas through the bubbler.
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