Substrate processing apparatus
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United States of America Patent
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Sep 25, 2012
Grant Date -
Feb 5, 2009
app pub date -
Jun 24, 2008
filing date -
Aug 3, 2007
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate processing apparatus includes first and second transfer chambers, first and second load lock chambers for exchanging one or more substrates with respective ones of first and the second transfer chambers, and a substrate transfer unit, located between the first and second load lock chambers, for transferring the one or more substrates to the first and second load lock chambers.
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