Flat panel display manufacturing apparatus
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United States of America Patent
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Sep 25, 2012
Grant Date -
Jan 29, 2009
app pub date -
Oct 7, 2008
filing date -
Nov 14, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Disclosed herein is a flat panel display manufacturing apparatus in a predetermined process is performed using plasma generated therein. In such a flat panel display manufacturing apparatus, a process gas is supplied into a chamber in an evenly diffused state to generate even plasma inside a symmetrical interior space of the chamber. Consequently, the flat panel display manufacturing apparatus can appropriately control flow rate of the plasma, thereby being capable of performing even processing on a large-scale substrate. In the flat panel display manufacturing apparatus, a substrate pedestal thereof is provided with a combination of vertical and horizontal shielding members, thereby being entirely protected from attack of the plasma, resulting in an increased life-span.
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