Magnetic pad for end-effectors
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United States of America Patent
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Oct 2, 2012
Grant Date -
Feb 11, 2010
app pub date -
Jan 9, 2009
filing date -
Aug 8, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
Embodiments of the invention relate to apparatus and method for supporting and transferring large area substrate in a vacuum condition. One embodiment of the invention provides an apparatus comprising one or more end effectors having a plurality of end effector pads disposed thereon without mechanically joining to the one or more end effectors. In one embodiment, a plurality of end effector pad assemblies are coupled to one or more end effectors by magnetic force.
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