Coating and processing apparatus and method
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United States of America Patent
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Oct 2, 2012
Grant Date -
Feb 11, 2010
app pub date -
Sep 30, 2009
filing date -
Mar 10, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.
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