Test-key for checking interconnect
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United States of America Patent
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Oct 2, 2012
Grant Date -
Mar 12, 2009
app pub date -
Nov 18, 2008
filing date -
Aug 29, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A test key for checking an interconnect structure is described, including a contiguous metal line and multiple conductive plugs on the contiguous metal line, wherein one end of each plug contacts with the contiguous metal line. The other end of at least one plug is not connected to any conductor. In addition, the two ends of the contiguous metal line are connected to different voltages.
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