Probe station for testing semiconductor substrates and comprising EMI shielding

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United States of America Patent

PATENT NO 8278951
SERIAL NO

11940355

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Abstract

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A probe station for testing semiconductor substrates, i.e., wafers and other electronic semiconductor elements, suitable for carrying out low-current and low-voltage measurement, comprises a shielding with which the electromagnetic influence (EMI) of the measurement of the semiconductor substrate can be minimized, and also comprises devices for the preparation of test signals. In addition, the housing of the probe station can offer a different possibility for the accessibility of individual components or component groups of the probe station.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fleischer, Hans-Jurgen Priestewitz, DE 7 38
Kanev, Stojan Thiendorf OT Sacka, DE 44 174
Kittlaus, Andreas Bad Liebenwerda OT Theisa, DE 2 22
Kreissig, Stefan Venusberg, DE 17 86
Schmidt, Axel Thiendorf OT Stöpchen, DE 71 622
Stoll, Karsten Sohland an der Spree, DE 12 73

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