Microshells with integrated getter layer

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United States of America Patent

PATENT NO 8288835
APP PUB NO 20110121412A1
SERIAL NO

13017844

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Abstract

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Microshells including a perforated pre-sealing layer and an integrated getter layer are provided. The integrated getter layer may be disposed between other layers of a perforated pre-sealing layer. The perforated pre-sealing layer may include at least one perforation, and a sealing layer may be provided on the pre-sealing layer to close the perforation.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION18 ZHANGJIANG ROAD PUDONG NEW AREA SHANGHAI 201203

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Howe, Roger T Los Gatos, US 68 4561
Monadgemi, Pezhman Fremont, US 44 1134
Quevy, Emmanuel P El Cerrito, US 52 1159

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