Defect detection recipe definition
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United States of America Patent
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Oct 16, 2012
Grant Date -
May 19, 2011
app pub date -
Nov 19, 2009
filing date -
Nov 19, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A method of forming a device is disclosed. The method includes providing a substrate and processing a layer of the device on the substrate. The layer is inspected with an inspection tool for defects. The inspection tool is programmed with an inspection recipe determined from studying defects programmed into the layer at known locations.
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