Electromechanical device with optical function separated from mechanical and electrical function

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United States of America Patent

PATENT NO 8289613
APP PUB NO 20110188109A1
SERIAL NO

13086113

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Abstract

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A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

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Patent Owner(s)

  • SNAPTRACK, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiang, Chih-Wei Hsin-Chu, TW 25 344
Chui, Clarence San Jose, US 259 8761
Cummings, William Clinton, US 32 776
Endisch, Denis Cupertino, US 15 483
Gally, Brian Los Gatos, US 32 952
Kogut, Lior Haifa, IL 45 1531
Tung, Ming-Hau San Francisco, US 78 2831
Tung, Yeh-Jiun Sunnyvale, US 36 1435

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