Thin metal film conductors and their manufacture

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United States of America Patent

PATENT NO 8293323
APP PUB NO 20080206450A1
SERIAL NO

11710604

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Abstract

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Metal solutions such as copper and nickel suitable for chemical solution deposition (CSD) are disclosed, and their manufacture into low resistivity thin metal films is disclosed. The films may be thermal processed at relatively low temperatures and may be co-fired with ultra low fire high K ceramic dielectrics.

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Patent Owner(s)

Patent OwnerAddress
PENN STATE RESEARCH FOUNDATION THE304 OLD MAIN UNIVERSITY PARK MI 16802

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ko, Song Won State College, US 2 0
McKinstry, Susan Trolier State College, US 4 6
Randall, Clive A State College, US 23 266
Randall, Michael S Simpsonville, US 29 238

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