Method and apparatus for detecting defects in optical components
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United States of America Patent
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Oct 23, 2012
Issued Date -
N/A
app pub date -
Apr 14, 2008
filing date -
Apr 13, 2007
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Abstract
A method is disclosed for detecting defects in an optical component to be tested, such as a lens comprising the steps of: providing a structured pattern, recording the reflected or transmitted image of the pattern on the optical component to be tested, phase shifting the pattern and recording again similarly the reflected or transmitted image, calculating the local phase and amplitude images of the optical component to be tested, calculating a model image of a defect free optical component and determining corresponding phase and amplitude images of the defect free model optical component, comparing phase and amplitude images of both optical component to be tested and defect free model optical component, determining suspect zones in the optical component to be tested, and applying a metrics to separate dust and noise from other defects.
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