Semiconductor pressure sensor
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United States of America Patent
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Nov 6, 2012
Grant Date -
Sep 3, 2009
app pub date -
Nov 1, 2005
filing date -
Nov 1, 2005
priority date (Note) -
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Abstract
An object of the present invention is to solve problems in that aluminum electrodes, aluminum wires, and I/O terminals are corroded by corrosive gasses when a pressure of a pressure medium containing corrosive matters such as exhaust gas is measured with a semiconductor sensor; and improve not only the corrosion resistance of the sensor chip but also the corrosion resistance of the portion particularly functioning as the pressure receiver.
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