Polarizer
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United States of America Patent
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Nov 6, 2012
Grant Date -
May 13, 2010
app pub date -
Nov 11, 2009
filing date -
Nov 13, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A polarizer of the present invention having a higher level of polarization performance for a light in the deep ultraviolet wavelength range includes: a substrate transparent to deep ultraviolet light; and a periodic structure including a plurality of structural elements at predetermined intervals on the substrate, the polarizer being configured so that the deep ultraviolet light incident thereon is split into a light component reflected by the periodic structure and a light component passing between the structural elements adjacent to each other, and the periodic structure being composed of chromium oxide or tungsten.
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