Advanced platform for processing crystalline silicon solar cells
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United States of America Patent
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Nov 13, 2012
Grant Date -
Apr 8, 2010
app pub date -
Oct 7, 2009
filing date -
Oct 7, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system. In one embodiment, a batch of solar cell substrates is simultaneously transferred in a vacuum or inert environment to prevent contamination from affecting the solar cell formation process.
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