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Abstract

An exposure apparatus for producing exposed structures in a photosensitive layer arranged on an object is provided. An object carrier and an exposure device, which can be moved relative to one another in an advance direction, enable exposure spots to be produced on the photosensitive layer in a position-controlled manner. The exposure device has at least one exposure unit with a series of radiation exit regions which are arranged successively in a series direction and from which exposure beams emerge, by means of each of which, passed through an imaging optical system, an exposure spot can be produced on the photosensitive layer and each of which can be deflected by a deflection unit in a deflection direction running transversely to the series direction, such that each exposure beam can produce exposure spots that at least partly overlap one another in a multiplicity of successive positions in the deflection direction.

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First Claim