Automated signature detection system and method of use
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 4, 2012
Grant Date -
Apr 10, 2008
app pub date -
Feb 26, 2007
filing date -
Oct 6, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An automated signature detection system and method of use and, more particularly, a predictive modeling component configured to accurately predict maintenance events for optical elements used in lithographic tools. The system comprises at least one module configured to analyze data associated with power illumination at a surface. The at least one module also is configured to fit a curve to the analyzed data using an exponentially based decay model.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully