Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation
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United States of America Patent
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Dec 4, 2012
Grant Date -
Jun 11, 2009
app pub date -
Jun 11, 2008
filing date -
Dec 10, 2007
priority date (Note) -
Expired
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Abstract
Processes and apparatus are described that form a solar cell absorber on a surface of a workpiece by reacting a precursor layer disposed on the surface of the workpiece with an absorber constituent vapor in a heating chamber. The absorber constituent material is delivered from an absorber constituent material delivery system in molten form into a container in the heating chamber and vaporized to be used during the reaction.
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