Method of forming magnetic pole section of perpendicular magnetic recording type thin-film magnetic head and manufacturing method of perpendicular magnetic recording type thin-film magnetic head

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United States of America Patent

PATENT NO 8323517
APP PUB NO 20110240593A1
SERIAL NO

12753557

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.

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Patent Owner(s)

Patent OwnerAddress
TDK CORPORATION2-5-1 NIHONBASHI CHUO-KU TOKYO 1036128 ?1036128

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hashino, Masachika Tokyo, JP 15 16
Otani, Koichi Tokyo, JP 26 173
Watanabe, Hisayoshi Tokyo, JP 40 236
Yatsu, Hideyuki Tokyo, JP 13 76

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