Method for producing a membrane comprising micropassages made from porous material by chemical mechanical polishing

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United States of America Patent

PATENT NO 8323733
APP PUB NO 20090252871A1
SERIAL NO

12382459

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Abstract

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A surface of a support comprising through micropassages is brought into contact with an aqueous solution comprising a plurality of particles in suspension and a pad. A pressure perpendicular to the plane of the support, between the pad and the surface of the support, and a relative movement of the pad and of the surface in a direction parallel to the plane of the support are applied. At least one particle is thus introduced in each microgap to form a porous material therein.

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Patent Owner(s)

  • COMMISSARIAT A L'ENERGIE ATOMIQUE;STMICROELECTRONICS (CROLLES 2) SAS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Coiffic, Jean-Christophe Grenoble, FR 7 32
Rivoire, Maurice Meylan, FR 22 235

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