Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
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United States of America
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Dec 4, 2012
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app pub date -
Feb 17, 2012
filing date -
Feb 17, 2012
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Abstract
In one an embodiment, there is provided an assembly comprising at least one detector. Each of the at least one detector includes a substrate having a doped region of a first conduction type, a layer of dopant material of a second conduction type located on the substrate, a diffusion layer formed within the substrate and in contact with the layer of dopant material and the doped region of the substrate, wherein a doping profile, which is representative of a doping material concentration of the diffusion layer, increases from the doped region of the substrate to the layer of dopant material, a first electrode connected to the layer of dopant material, and a second electrode connected to the substrate. The diffusion layer is arranged to form a radiation sensitive surface.
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