Method for adjusting resonance frequencies of a vibrating microelectromechanical device
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United States of America Patent
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Dec 11, 2012
Grant Date -
Apr 22, 2010
app pub date -
Oct 21, 2008
filing date -
Oct 21, 2008
priority date (Note) -
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Abstract
The present invention relates to a method for adjusting the resonant frequencies of a vibrating microelectromechanical (MEMS) device. In one embodiment, the present invention is a method for adjusting the resonant frequencies of a vibrating mass including the steps of patterning a surface of a device layer of the vibrating mass with a mask, etching the vibrating mass to define a structure of the vibrating mass, determining a first set of resonant frequencies of the vibrating mass, determining a mass removal amount of the vibrating mass and a mass removal location of the vibrating mass to obtain a second set of resonant frequencies of the vibrating mass, removing the mask at the mass removal location, and etching the vibrating mass to remove the mass removal amount of the vibrating mass at the mass removal location of the vibrating mass.
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