Fluid controller
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United States of America Patent
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Dec 11, 2012
Grant Date -
Mar 25, 2010
app pub date -
Jan 15, 2008
filing date -
Jan 29, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
There is provided a fluid controller having an enhanced vibration preventing characteristic without affecting pressure controlling operations. A valve element 4 is moved with respect to a valve seat 3 due to a change of balance between a fluid pressure acting on a diaphragm 10 and an elastic force of a pressure-setting spring 13, thereby controlling a pressure of a fluid. A vibration prevention member 17 is placed in a disk-shaped movable member 12 which moves integrally with the diaphragm 10. The vibration prevention member 17 includes a casing which incorporates therein a weight member interposed between elastic members.
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