Conformal coating of highly structured surfaces
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United States of America Patent
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Dec 11, 2012
Grant Date -
Apr 19, 2012
app pub date -
Oct 14, 2010
filing date -
Oct 14, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.
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