Isolation channel improving measurement accuracy of MEMS devices
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United States of America Patent
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Dec 11, 2012
Grant Date -
Dec 24, 2009
app pub date -
Sep 23, 2008
filing date -
Jun 20, 2008
priority date (Note) -
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Abstract
A system for improving the performance of a microelectromechanical systems (MEMS) device that is housed in a package and implemented on a printed circuit board (PCB) comprises a footprint, an isolation channel, and a bridge. A portion of the isolation channel is removed to mechanically isolate the MEMS device.
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